By Martin Bögner, Theodor Doll (auth.), Theodor Doll (eds.)
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Additional info for Advanced Gas Sensing: The Electroadsorptive Effect and Related Techniques
Let. 43,839-841, 1983 S. E. Endres, E. M. D. Jeffrey et al. Gassensitive Field Effect Transistor Utilizing a Thin Film of Lead Phtalocyanine as the Gate Material, Thin Sol. Films, 151, Ll 11-1 13, 1987 G. Levi, 1. Janata, Appl. Phys. , 43, 7, 1983 B. Flietner, T. Doll, 1. Lechner, I. Eisele, Adsorption induced Gas Transport Phenomena in Narrow Channels Recorded with Work Function Detectors, Jor. Vac. Sci. , A 14(2), 1996 I. Eisele, B. Flietner, T. Doll, Verfahren zum spacerfreien, hybriden Autbau von Luftspalt und Gate Feldeffekttransistoren (SGFET) sowie nach dem Verfahren hergestellte Bauelemente, German Patent DE 4239319 C2, 1996 S.
44 Chapter 2 The temperature of the substrate is monitored by using a NilNi-Cr thermoresistor on the backside. To provide a clean and stochiometric surface an oxygen treatment of the sample at 933 K and 20,000 Pa partial oxygen pressure for 15 min in the preparation chamber is performed. The oxidised sample is positioned in front of the gas nozzle. Mter the shutting of the gas valve the gas flux intensity decreases exponentially: The velocity constants kr of the desorption are calculated by using an exponential fit to the declining part of the resulting MBRS graphs.
82 1. INTRODUCTION In spite of extensive research and development of conductivity-controlled gas sensing, corresponding potential-controlled gas sensing has so far been investigated and applied in practical devices only in a few cases [1-4]. This is surprising since conductivity changes are always related with potential changes. g. using the chemical . Kelvin probe setup [5-7]. In addition, the straight-forward understanding of 3. Potential-Controlled Gas-Sensor Devices 57 electrical potentials on the basic science level is usually easier if compared with the corresponding understanding of conductivities.
Advanced Gas Sensing: The Electroadsorptive Effect and Related Techniques by Martin Bögner, Theodor Doll (auth.), Theodor Doll (eds.)